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Surface Cleaning Products Course Descriptions

SupremaTM Maintenance Overview – Level 1 and 2
Free with 2-Training Credits per student.

This course is an introductory course for new users; this is a 10-day course over a two-week period.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation procedure
  • Platform overview and component location
  • GUI screen navigation and definitions
  • Platform preventive maintenance schedule review and discussion
  • Performance of the Platform PM’s that are needed most often
  • Process Module functional description
  • Process Module preventive maintenance schedule review and discussion
  • Performance of the Process Module PM’s that are needed most often
  • maXus Tool auto operations
  • X-track leveling and teaching
  • Atmospheric Robot leveling and teaching
  • Cassette or FOUP leveling
  • Complete Vacuum Robot teaching of all hand-off stations
  • Auto run and wafer handling verification

            Prerequisite: None
            Length: 10-days

SupremaTM Advanced Maintenance Level 4 In Development
Not a free class.

This course is for the advanced user; it is required to attend the Level 1 and 2 Maintenance Overview course to qualify for this training.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation

            Prerequisite: Level 1, 2
            Length: 5-days

 

Aspen III Maintenance Overview – Level 1
Free with 1-Training Credit per student.

This course is an introductory course for new users; this is the first week of a normal two-week course.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation procedure
  • Platform overview, component location
  • GUI screen navigation and definitions
  • Platform preventive maintenance schedule review and discussion
  • Performance of the Platform PM’s that are needed most often
  • Process Module functional description
  • Process Module preventive maintenance schedule review and discussion
  • Performance of the Process Module PM’s that are needed most often
  • Aspen III Tool auto operations
            Prerequisite: None           
            Length: 5-days

 

Aspen III Robot Teaching – Level 2
Free with 1-Training Credit per student.

This course is for the more experienced user; this is the second week of a normal two-week course.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation procedure
  • X-track leveling and teaching
  • Procomm set-up and use
  • Atmospheric Robot leveling
  • PeWin set-up and use
  • Complete Atmospheric Robot teaching of all hand-off stations
  • Wafer Mapping set-up and test
  • Cassette or FOUP leveling
  • Vacuum Robot leveling
  • Complete Vacuum Robot teaching of all hand-off stations
  • Auto run and wafer handling verification
            Prerequisite: Aspen III - Level 1
            Length: 5-days

 

Aspen III Module classes – Level 3
Not a free class.

This course is for the experienced user; this course is not covered by warranty or training credits.  It is required to take the Level 1, and Level 2 Aspen III courses to attend this class.  For ICPht, CVD, Strip, Highlands, eHighlands Modules.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation procedure
  • Process theory of operation
  • Review of interconnect diagrams and signal flow
  • Component Removal and Replacement
  • Major PM procedure hands-on

            Prerequisite: Aspen III – Level 1 and Level 2
            Length: 3-days

 

Aspen III Advanced Wafer Handling – Level 3
Not a free class.

This course is for the experienced user; this course is not covered by warranty or training credits.  It is required to take the Level 1 and Level 2 Aspen III courses to attend this class.
The course covers the following:

  • Course introduction
  • Equipment safety and Evacuation procedure
  • Platform preventive maintenance review and discussion
  • Performance of major Platform PM’s
  • Remove and Replace Robot components not covered by PM
  • Re-teaching of the wafer handling system
  • Review of the Robot Troubleshooting Guide
  • Auto Run and wafer handling verification
            Prerequisite: Aspen III – Level 1 and Level 2           
            Length: 5-days

 

Aspen III Advanced Maintenance – Level 4
Not a free class.

This course is for the experienced user; this course is not covered by warranty or training credits.  It is required to take the Level 1, Level 2, and Level 3 Aspen III courses to attend this class.
The course covers the following:

  • Course introduction
  • Equipment safety and Evacuation procedure
  • Analog board adjustments
  • I/O review and hands-on use
  • Advanced PMAC diagnostics troubleshooting
  • Robot Mapping
  • Robot signal measurement
  • Strip process fundamentals
  • Strip recipe fundamentals
  • Review of process troubleshooting
  • RF matchbox and generator set-up
  • Platform maintenance review
  • Tech Support Bulletins, Best Known Methods and Fault analysis

            Prerequisite: Aspen III - Level 1, Level 2, and Level 3
            Length: 5-days

 

Aspen II Core Strip Overview & Maintenance – Level 1
On-site only, call for scheduling.

This course is an introductory course for new users; this is the first week of a normal two-week course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation procedure
  • Core system overview
  • System operations
  • Component location
  • User interface overview and operation
  • General equipment theory
  • Maintenance hands-on
  • Robot theory, operation, wafer transfer functionality and alignments hands-on
  • QNX software commands
            Prerequisite: None           
            Length: 5-days

 

Aspen II Strip Module Overview & Maintenance – Level 2
On-site only, call for scheduling.

This course is for the more experienced user; this is the second week of a normal two-week course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation procedure
  • Strip process theory overview
  • Process module hardware review
  • Preventive Maintenance procedure hands-on
  • Generator control and adjustments hands-on
  • Heater control and operation
            Prerequisite: Aspen II - Level 1
            Length: 5-days

 

 
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