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RTP Product Course Descriptions

Helios Maintenance Overview - Level 1 and Level 2
Free with 2-Training Credits per student.

This course is an introductory course for new users; this is a 2-week maintenance course.  The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • System operations overview
  • Wiring document overview
  • Component location
  • Network and Computer overview
  • Maintenance overview
  • Software functions
  • Fault and abort status identification
  • Power Rack overview
  • Handling recovery
  • Preventive and general corrective maintenance procedure hands-on
  • Process module overview
  • Power and control system overview
  • Gas and cooling systems overview
  • Lamp exchange
  • Quartz R&R
  • Temperature system overview
  • Robot management, and computer system overview
  • In depth gas flow theory
  • Recipe creation, management, and optimization
  • Introduction to CAST
  • Installing Calibration wafers
  • Temperature and pyrometer theory and calibration
  • Lamp correction, theory and optimization
  • Acquisition and transfer of Calibration data
  • Chamber Matching
  • Engineering software controls and functions
            Prerequisite: None
            Length: 10-days                                                                                                                                                                                   

 

Helios Steam – Level 2 In Development
Free with 2-Training Credits per student.

This course is for the advanced user; it is required to attend the Level 1 and 2 Maintenance Overview course to qualify for this training.The course covers the following:
  • Course introduction
  • Equipment safety and evacuation

            Prerequisite: Level 1, 2
            Length: 5-days

 

Temp Cal - Level 4
Not a free course.

This course is for the advanced users; it is required to attend level 1 and 2 of the Helios courses.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation
  • Analyze Fast I/O and Transfer AD card signals
  • Peltier Current control unit overview
  • Wafer and Lamp Pyro overview
  • Pyro chiller overview
  • Install Calibration wafer
  • Acquisition and transfer of calibration data
  • CAST software overview
  • Calibrate Lamp control circuit
  • Chamber matching
  • Calibration check

            Prerequisite: 2900 or 3000 - Level 1, 2
            Length: 5-days

 

Helios Advanced Maintenance - Level 4
Not a free course.

This course is for the advanced users; it is required to attend level 1 and 2 courses and work for six months on the Helios before attending this course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • Functional overview of major and minor subsystems
  • Fault and abort status identification for Heating Interlock sequence
  • Fault and abort status identification for Personal and Machine safety
  • Fault and abort status identification for Main Breaker control circuit
  • Fault and abort status identification for Main Power circuit
  • Maintenance software functions
  • Schematic overview
  • Trouble identification and isolation techniques
  • Hands-on troubleshooting of machine components
            Prerequisite: Helios - Level 1, 2
            Length: 5-days
           
 
RTP-3000 Maintenance Overview - Level 1 and Level 2
Free with 2-Training Credit per student.

This course is an introductory course for new users; this is a 2-week course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • System operations
  • Component overview
  • Schematic and wiring document overview
  • Maintenance software functions
  • Network and Computer overview
  • Exercise and practice UNIX, FTP, Telnet, VI editor
  • Fault and abort status identification
  • Handling recovery
  • Cooling circuit overview
  • Preventive and general corrective maintenance
  • Process module overview
  • Power and control system overview
  • Gas and cooling systems overview
  • Quartz R&R
  • Lamp exchange
  • Temperature system overview
  • Robot management
  • Robot Teaching
  • Computer system overview
  • In depth gas flow theory
  • Computer network communications
  • Software structure and GUI overview
  • Recipe creation and management
  • Make a Calibration wafer
  • Recipe optimization
  • Temperature and pyrometer theory and calibration
  • Lamp correction tables, LCT, CoCoS, FAC
  • Opus for Flash Anneal
  • P-I-D theory and optimization
  • Engineering software controls and functions   

            Prerequisite: None
            Length: 10-days
           

3000 Steam – Level 2
Free with 1-Training Credit per student.

This course is for the advanced user; it is required to attend the Level 1 and 2 Maintenance Overview course to qualify for this training.The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • Steam and Standard Tool comparison
  • Steam Components overview
  • Wiring Documents overview
  • Hardware and structure of Steam Generator
  • Steam Controller overview
  • Structure of HBU
  • Exercise and practice at the Steam Tool
  • Generator and Tool interface
  • Enable requirements and Software
  • Recipe editor, Hydrogen and Oxygen gas flows
  • Rotation setup, adjust and use in recipe
  • Hardware component monitoring

            Prerequisite: Level 1, 2
            Length: 5-days

 

RTP-3000 Advanced Maintenance - Level 4
Not a free course.

This course is for the advanced users; it is required to attend the two previous level courses and work for six months on the 3000 before attending this course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • Functional overview of major subsystems
  • Computer system and structure
  • UNIX and VI commands
  • Telnet and FTP
  • Lamp DC power switching system
  • Rotation setup, adjustments
  • Enhanced Independent Lamp Controller
  • Network communication
  • Robot and Pre-aligner communication, power, vacuum sensor, and adjustments
  • Cassette systems, SMIF, FOUP, Combi overview
  • Fault and abort status identification
  • Maintenance software functions
  • Schematic overview
  • Rotation
  • Trouble identification and isolation techniques
  • Hands-on troubleshooting of machine components

            Prerequisite: 3000 - Level 1, 2 
            Length: 5-days

 

Ripple Temp Cal - Level 4, In development
Not a free course.

This course is for the advanced users; it is required to attend level 1 and 2 of the 2900 or 3000 courses.
The course covers the following:

  • Course introduction
  • Equipment safety and evacuation

            Prerequisite: 2900 or 3000 - Level 1, 2
            Length: 5-days

 
RTP-2900 Maintenance Overview - Level 1 and Level 2
Free with 2-Training Credit per student.

This course is an introductory course for new users; this is a 2-week course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • System operations
  • Component overview
  • Maintenance software functions
  • Fault and abort status identification
  • Handling recovery
  • Preventive and general corrective maintenance
  • Process module overview
  • Power and control system overview
  • Gas and cooling systems overview
  • Quartz R&R
  • Lamp exchange
  • Temperature system overview
  • Robot management
  • Robot Teaching
  • Computer system overview
  • In depth gas flow theory
  • Recipe creation and management
  • Recipe optimization
  • Temperature and pyrometer theory and calibration
  • Lamp correction
  • P-I-D theory and optimization
  • Engineering software controls and functions

            Prerequisite: None
            Length: 5-5ays

 
 
RTP-2900 Advanced Maintenance - Level 4
Not a free course.

This course is for the advanced users; it is required to attend the two previous level courses and work for six months on the 2900 before attending this course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • Functional overview of major and minor subsystems
  • Fault and abort status identification for Heating Interlock sequence
  • Fault and abort status identification for Personal and Machine safety
  • Fault and abort status identification for Main Breaker control circuit
  • Fault and abort status identification for Main Power circuit
  • Maintenance software functions
  • Schematic overview
  • Trouble identification and isolation techniques
  • Hands-on troubleshooting of machine components

            Prerequisite: 2900 - Level 1, 2
            Length: 5-days

 
RTP-2800 Maintenance Overview - Level 1 and Level 2
On-site only, call +49-7348-981-103 for scheduling.

This course is an introductory course for new users; this is a 2-week course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • System operations
  • Component overview
  • Maintenance software functions
  • Fault and abort status identification
  • Handling recovery
  • Preventive and general corrective maintenance
  • Process module overview
  • Power and control system overview
  • Gas and cooling systems overview
  • Quartz R&R
  • Lamp exchange
  • Temperature system overview
  • Robot management
  • Robot Teaching
  • Computer system.
  • In depth gas flow theory
  • Recipe creation and management
  • Recipe optimization
  • Temperature and pyrometer theory and calibration
  • Lamp correction
  • P-I-D theory and optimization
  • Engineering software controls and functions

            Prerequisite: None
            Length: 5-days

 

RTP-2800 Advanced Maintenance - Level 4
On-site only, call +49-7348-981-103 for scheduling.

This course is for the advanced users; it is required to attend the two previous level courses and work for six months on the 2800 before attending this course.
The course covers the following:
  • Course introduction
  • Equipment safety and evacuation
  • Functional overview of major and minor subsystems
  • Fault and abort status identification for Heating Interlock sequence
  • Fault and abort status identification for Personal and Machine safety
  • Fault and abort status identification for Main Breaker control circuit
  • Fault and abort status identification for Main Power circuit
  • Maintenance software functions
  • Schematic overview
  • Trouble identification and isolation techniques
  • Hands-on troubleshooting of machine components

            Prerequisite: 2800 - Level 1, 2
            Length: 5-days
           

 

 
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