Allen Lu - President and Chief Executive Officer
Dr. Allen Lu is an industry veteran with diverse experiences in technology, manufacturing, business, and management. Dr. Lu
brings to Mattson Technology an extensive knowledge and network in the global semiconductor industry. Under his leadership,
Mattson Technology provides innovative solutions to its global customer base.
Prior to joining Mattson Techonology, Dr. Lu was Vice President of SEMI and President of SEMI China. He transformed SEMICON China
into the largest global platform connecting the semiconductor manufacturing supply chain. Prior to joining SEMI, Dr. Lu served
as the China Fab Program Manager for Intel's Technology Manufacturing and Engineering Group, Director of Intel China Public
Affairs, and in various management and technology roles in Intel's California Technology and Manufacturing Group. Dr. Lu
was a key member of the Intel's team driving expansion in China for manufacturing, R&D, and business development. Prior to
Intel, Dr. Lu was a technologist at Applied Materials.
Dr. Lu has a Ph.D. in solid state physics from the University of Virginia, and a B.Sc. from the University of Science and Technology