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The Millios™ millisecond (ms) anneal system is Mattson Technology’s latest tool introduction, which enables industry leading processing times of approximately one millisecond. Mattson’s philosophy is to afford its customers the lowest Cost of Ownership paired with leading edge technology.
Millios features a direct temperature measurement and control throughout the ms-anneal cycle. The proprietary design of the front side temperature control enables our customers to achieve best device performance for their advanced technology nodes. This innovative capability is supported by industry leading throughput that provides Mattson’s customers the lowest CoO.
Millios enables a variety of applications due to its flexibility with process temperature, peak width and standard spike anneal heating. The critical evaluation parameter of wafer breakage for ms anneal systems has been successfully accomplished by Millios. By utilizing Mattson’s chamber design and heating concept, wafer breakage is not an issue for our customers. |
