July 2008
DEFECT-FREE
HIGH TEMPERATURE PROCESSING
November 2007
50TH ANNIVERSARY PERSPECTIVES: WORLDWIDE AND PERVASIVE EXPANSION
OF SEMICONDUCTORS
Solid State Technology/WaferNews, Supplement
March 2007
SELECTIVE OXIDATION OF ADVANCED GATE STACKS WITH TUNGSTEN
ELECTRODE
SEMICONDUCTOR
Manufacturing Magazine China (English)
SEMICONDUCTOR
Manufacturing Magazine China (simplified Chinese)
October
24, 2006
MATTSON EXTENDS SELECTIVE OXIDATION TO ADVANCED GATE STACKS
Solid State Technology/WaferNews, Technology News
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