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Spares
 

 

SPARES
Tools
    * 2800
    * 2900
    * 3000
    * Alpine
    * AspenII
    * AspenIII
    * Helios
    * Millios
    * paradigmE
    * Suprema
    * Monthly Specials
 

SPARES

Suprema

Suprema
 
   
Part Number
Description
   
1000418 Assy, Source Coil
   
1000503 Xsducer, Pressure, N2, 1000 Torr
   
1000526 O-Ring Adapter Plate To PM
   
1000527 O-Ring, Slit Door, PM
   
1000529 O-Ring, TM Lid
   
1000530 O-Ring, Adapter Plate to Xfer
   
1000531 O-Ring, PM Slit Door Lower Assy
   
1000669 O-Ring, LL Lid
   
1000670 O-Ring, TM Slit Door Lower Assy
   
1000920 O-Ring, PM Chamber Lid
   
1001016 Manometer, 10 TORR
   
1001305 Signal Rear Light Tower
   
1001354 RF Generator
   
1001388 O-Ring Seal Kit, VAT Valve
   
1001466 Faraday Shield
   
1001486 Timing Belt, Theta Motor
   
1001487 Timing Belt, Z-Motor
   
1001490 Quad Seal, Inner Shaft, Vac Robot
   
1001491 Quad Seal, Outer Shaft, Vac Robot
   
1001492 Quad Seal, Seal Linear
   
1001627 Quad Seal, Slit Door
   
1001628 Quad Seal, Slit Door
   
1001902 Capacitor
   
1001972 End Point Detector
   
1002662 Power Supply, 24VDC, 27Amp
   
1002663 Power Supply, 48VDC
   
1002664 Power Supply, 24VDC, 240W
   
1003025 Contactor, Main
   
1003027 Fuse, 2Amp Rejection
   
3000095 PIB
   
3000101 Process Module PM2
   
3000189 Assy, MFC I/F
   
3000436 Ethernet Switch
   
3000833 Cbl Assy, RB-1 J11, Z Mot RS485, MX2
   
3000834 Cbl Assy, RB-1 J21, Z Mot PWR, MX2
   
3000835 Cbl Assy, RB-1 J31, Z Mot I/O, MX2
   
3000836 Cbl Assy, RB-1 J41, Z Mot Home Sns, MX2
   
3000837 Cbl Assy, RB-1 J13, A1 Mot RS485, MX2
   
3000838 Cbl Assy, RB-1 J22, A1 Mot PWR, MX2
   
3000839 Cbl Assy, RB-1 J32, A1 Mot I/O, MX2
   
3000840 Cbl Assy, RB-1 J42, A1 Mot Home Sns, MX2
   
3000842 Cbl Assy, RB-1 J23, A2 Mot PWR, MX2
   
3000843 Cbl Assy, RB-1 J33, A2 Mot I/O, MX2
   
3000844 Cbl Assy, RB-1 J43, A2 Mot Home Sns, MX2
   
3000845 Cbl Assy, RB-1 J14, B1 Mot RS485, MX2
   
3000846 Cbl Assy, RB-1 J24, B1 Mot PWR, MX2
   
3000847 Cbl Assy, RB-1 J34, B1 Mot I/O, MX2
   
3000848 Cbl Assy, RB-1 J44, B1 Mot Home Sns, MX2
   
3000850 Cbl Assy, RB-1 J25, B2 Mot PWR, MX2
   
3000851 Cbl Assy, RB-1 J35, B2 Mot I/O, MX2
   
3000852 Cbl Assy, RB-1 J45, B2 Mot Home Sns, MX2
   
3001311 Assy, Blade Slit Door, PM
   
3001443 EMO Board
   
3001469 Electrical Enclosure
   
3001571 Assy, Front Door
   
201-22322-00 Reservior, Grease, Axial Seal
   
255-22550-00 PCB, Assy, Pump/Chiller/Scrubber Int
   
255-23613-00 Analog Filter
   
263-09456-00 Kit, Computer CPU Card
   
263-21681-01 RF Coax Cable, Head AC
   
263-21681-02 RF Coax Cable, Head BD
   
302-21865-00 Coil Capacitor Tab, ICPht
   
303-07405-00 Insulator
   
304-21659-00 Anti-Skate Pin
   
405-20548-01 Kit, Computer CPU Card
   
456-00226-03 O-ring, Seal Linear
   
456-00226-26 O-Ring Slit Door, TM
   
456-00226-56 O-Ring, Front Door
   
456-00226-74 O-Ring, Slit Door Lower Assy, PM
   
456-00226-92 O-Ring, Plate, Lift Pin
   
456-01027-19 O-Ring View Port
   
456-15592-01 O-Ring, Slit Door Lower Assy, PM
   
456-23323-00 O-Ring Quartz Tube
   
456-24416-00 O-Ring, VAT Valve, NW100
   
483-13911-00 TORR Switch
   
483-23052-00 Foreline Pressure Switch
   
491-23177-00 Vacuum Valve
   
493-16983-00 Valve,Swglk,Pneu, F/F,1/4 VCR, 5R
   
505-12577-00 Fan, RF Cage (consumables)
   
509-16446-00 Pyrex Window
   
513-21953-00 Sensor, Lift Pin
   
517-24229-00 KVM Unit
   
551-24255-00 Kit, Computer CPU Card
   
552-23537-00 Converter RS232 / RS485
   
553-21311-00 Mtchd Ntwk, 208VAC
   
559-17198-00 Analog outputs, 16 Channel
   
559-22754-00 Digital I/O, 64 in / 64 out
   
559-24270-00 Analog outputs, 64 Channel
   
559-24271-00 RS232, 4Ports
   
566-03902-00 Time Delay Relay
   
566-20589-00 Assy, Relay Board, Rev-P
   
635-08804-00 Grease, Fomblin
   
913-10055-00 O-Ring, Lower Assy, Lift Pin
   
933-11004-00 IDEC Ice Cube Relay
   
934-13002-00 Power Supply, +/-15VDC
   
   
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