Continuous integrated circuit device scaling includes fabrications of small, deep and complex 3D structures composed of thin layers of different materials. Manufacturing requires ultra-high selectivity in materials removal processes, and a precise control of physical, chemical and electrical properties of thin film surfaces.
NovykaTM Product Family
Mattson Technology's NovykaTM products provide unique solutions to some of the most critical technical challenges in advanced logic and memory device manufacturing. The NovykaTM products enable ultra-high selectivity in removal of thin and delicate layers in 3D devices structures. They also offer the best total cost of ownership in their class.