Mattson Technology’s Plasma Etch Products Delivering Unique Plasma Source Technology Over 100 ICP Etch Systems in High Volume Production
Leader in Dry Strip Market and Surface Cleaning Industry Benchmark in Photoresist Removal Purest High Density Radical Source
Millios ® Brightest Man-Made Light Source on Earth Most Flexible Millisecond Anneal & Silicidation Tool
Helios  Product Family ® Best Pattern Loading Performance in Rapid Thermal Processing Leading Double-Sided Heating Solution

About Us

We design, manufacture, market and globally support semiconductor wafer processing equipment used in the fabrication of integrated circuits.

Read More


Our manufacturing equipment for Dry Strip, Plasma Etch, Surface Treatment and Ultra-Selective Materials Removal, Rapid Thermal Processing and Millisecond Anneal utilizes innovative technologies to deliver advanced processing capabilities and high productivity for the fabrication of current and next-generation integrated circuits.

Read More

Contact Us

Headquartered in Silicon Valley, we maintain a global infrastructure to meet the needs of our diverse customer base.

Read More

Contact Us

We have our roots in Silicon Valley.

Corporate Headquarters

47131 Bayside Pkwy.
Fremont, CA 94538

Worldwide Locations

Additional Contact Information:

Parts Support:

Technical Support:

Atomic Surface Engineering™ Sales and Support: