Management Team

Allen LuAllen Lu

President and Chief Executive Officer

Dr. Allen Lu is President and Chief Executive Officer of Mattson Technology. Dr. Lu joined Mattson Technology in June 2016 and in October 2016 was appointed as President and Chief Executive Officer.

Dr. Lu is an industry veteran with over 30 years of diverse experiences in technology, manufacturing, business and management. Prior to joining Mattson Technology, Dr. Lu was Vice President of SEMI and President of SEMI China, where he transformed SEMICON China into the largest global platform for connecting the semiconductor manufacturing supply chain. Prior to that, Dr. Lu served as the China Fab Program Manager for Intel’s (INTC) Technology Manufacturing and Engineering Group, Director of Intel China Public Affairs and in various management and technology roles in Intel’s California Technology and Manufacturing Group. Dr. Lu was a key member of Intel’s team driving expansion in China for manufacturing, R&D and business development. Prior to Intel, Dr. Lu was a technologist at Applied Materials (AMAT).

Dr. Lu has a Ph.D. in solid state physics from the University of Virginia, and a B.Sc. from the University of Science and Technology of China.

Subhash DeshmukhSubhash Deshmukh

Chief Business Officer, Worldwide Business

Dr. Subhash Deshmukh is Chief Business Officer at Mattson Technology, responsible for worldwide sales, marketing and service. Dr. Deshmukh joined Mattson Technology in June 2017.

Prior to joining Mattson Technology, Dr. Deshmukh was Chief Operating Officer at Poet Technologies (V:PTK). Dr. Deshmukh has more than 25 years of industry experience, including serving as Vice President of Emerging Technologies and Products at Applied Materials (AMAT), Vice President and General Manager of the Plasma Products Business Unit and Vice President of Business Development at Varian Semiconductor Equipment Associates (VSEA), General Manager of Dielectric Etch Products Division at Applied Materials, and other key management roles at Lam Research (LRCX) and AMI Semiconductors (AMIS). Dr. Deshmukh has been granted over 27 patents and has authored and co-authored more than 55 technical articles.

Dr. Deshmukh has a Ph.D., as well as a M.S. in Chemical Engineering from Wayne State University.

Schubert ChuSchubert Chu

Chief Product Officer

Dr. Schubert Chu is Chief Product Officer of Mattson Technology, responsible for leading the Company’s product strategy, development and support. Dr. Chu joined Mattson Technology in January 2021.

Dr. Chu has an extensive track record in the semiconductor industry directing product teams and driving market share growth. Prior to joining Mattson Technology, Dr. Chu served as VP and General Manager of Epitaxy Products and VP of Business Development at Applied Materials (AMAT). During his tenure at Applied Materials, Dr. Chu also held numerous other roles in product management and development, product support and as a technologist.

Dr. Chu has a B.S., M.S. and a Ph.D. in Mechanical Engineering from the University of California at Berkeley. Dr. Chu has been granted over 50 U.S. patents and has co-authored over 50 peer-reviewed scientific publications and conference papers.

Mike MyoMike Myo

Chief Operating Officer

Mr. Mike Myo is Chief Operating Officer of Mattson Technology with responsibility for manufacturing, supply chain, quality, production planning, facilities and information technology. Since joining Mattson Technology in March 2021, Mr. Myo has held various positions with increasing levels of responsibility, assuming the role of Chief Operating Officer in October 2023.

Prior to joining Mattson Technology, Mr. Myo held several senior level positions at Applied Materials (AMAT), including the Head of Engineering for Epitaxy Products Group and the Head of Sourcing for the MDP Division.

Mr. Myo has a B.Sc. and M.Sc. in Mechanical Engineering from the University of Alberta, Edmonton, Canada. Mr. Myo has been granted numerous U.S. patents for innovations in Epitaxy and other semiconductor products.

Jon MyersJon Myers

Vice President, Mattson Support Business Group

Mr. Jon Myers is Vice President of the Mattson Support Business Group (MSBG), responsible for global customer support services, including field service operations, after-sales support and spare parts fulfillment. Mr. Myers joined Mattson Technology in July 2017.

Mr. Myers has over 30 years of experience in the semiconductor equipment and materials industry, serving in a variety of senior executive roles. Prior to joining Mattson Technology, Mr. Myers served as Vice President, Sales and Marketing at both Vacuum Engineering & Materials and Silicon Valley Technology Center Technologies. Prior to that, Mr. Myers served as General Manager, Customer Support Business Group at Lam Research (LCRX), where he managed their global service organization, and also as General Manager, North America Regional Operations, responsible for the division’s sales, service, process and technology. Prior to Lam Research, Mr. Myers held various management roles at Teradyne (TER) and General Electric (GE).

Mr. Myers has a B.Sc. in Mechanical Engineering from Cornell University and a M.B.A. from Harvard University.